Research on Signal Detection Method for Differential Capacitive Sensors
In order to improve the measurement accuracy of the signal detection circuit of differential capacitive sensors,this paper proposes a method that combines Delta-Sigma modulation technology with differential capacitive sensors to create a new type of signal detection system.This signal detection method places differential capacitive sensors,pre-amplifiers,and phase sensitive detection circuits within a Delta-Sigma feedback loop,forming a large feedback loop.By deriving the system transfer function of the detection circuit,we analyzed the technical advantages of using Delta-Sigma modulation technology in this detection method,designed a circuit board and tested it.The research results indi-cate that the digital output of the signal detection method proposed in this article has a high correlation with the magnitude and direction of the deviation of the center plate from the equilibrium position,which has a good promoting effect on further improving the measurement accuracy of the differential capacitive sensor detection circuit.
Differential capacitive sensorDelta-Sigma modulation technologyPhase sensitive detectionAnalog to digital convert
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