In order to realize high-precision real-time detection of large-stroke precision optical focusing components In order to realize high-precision real-time detection of large-stroke precision optical focusing components,high-precision long-displacement sensors based on axial eddy current effect are studied. A long-displacement eddy current probe simulation model is established for linearity testing,an eddy current sensor test system is built for accuracy experiments,and the long-displacement eddy current sensor is connected to the precision optical focusing assembly. The experimental results show that while the measurable displacement reaches 24 mm,the linearity is better than 1％,the resolution is better than 0.5 μm,the accuracy is better than 1 μm,and the high-precision long-displacement eddy current sensor meets the requirements of the precision optical focusing assembly.
关键词
电涡流传感器/轴向电涡流效应/精密光学调焦组件/长位移/高精度
Key words
eddy current sensor/axial eddy current effect/precision optical focusing component/long-displacement/high-precision
维普
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