A non-contact optical microcavity liquid pressure measurement system
In order to meet the demand of measuring liquid pressure in narrow chamber,this paper designs a non-contact Fabry-Perot microcavity based optical liquid pressure measuring system.The optical microcavity is fabricated by two-photon 3D printing technology,with a compact size of 350 μm.The diaphragms with a thickness of 4 μm and 6 μm were designed.The system is based on combination of the embedded design and diffraction grating spectral module,which can acquire the optical interference signal,realizing high-resolution spectrum dynamic demodulation.The experiments show that the sensing sensitivity of the 4 μm-thickness device can reach 398 pm/kPa at room temperature(25 ℃),and the system shows a high resolution of 35.5 Pa and good repeatability,which has potential in biomedical intraocular pressure sensing applications.
microcavity pressure sensingtwo-photon 3D printing technologynon-contact optical sensingliquid pressure measurement system
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