一种非接触式光学微腔液压测量系统
A non-contact optical microcavity liquid pressure measurement system
魏鹤鸣 1侯林嵩 1丁武成 1殷瑞雪 2任冬妮3
作者信息
- 1. 上海大学特种光纤与光接入网重点实验室 上海 200444
- 2. 华东理工大学机械与动力工程学院 上海 200000
- 3. 明澈生物科技(苏州)有限公司 苏州 215100
- 折叠
摘要
为满足在狭小腔室中测量液体压强的需求,设计了一种非接触式光学法布里珀罗微腔液压测量系统,其中,光学微腔采用双光子三维打印技术制备,膜结构尺寸仅为350 μm,设计的膜厚分别为4 μm和6 μm.系统主要采用嵌入式设计与衍射光栅光谱模块互联,实时采集光学微腔干涉光谱信号,实现了高精度光谱动态解调.实验结果表明,室温(25 ℃)下,4 μm膜厚的微腔液压灵敏度高达398 pm/kPa,系统分辨率可达35.5 Pa,重复性较好,有望用于生物医学眼压等应用场景.
Abstract
In order to meet the demand of measuring liquid pressure in narrow chamber,this paper designs a non-contact Fabry-Perot microcavity based optical liquid pressure measuring system.The optical microcavity is fabricated by two-photon 3D printing technology,with a compact size of 350 μm.The diaphragms with a thickness of 4 μm and 6 μm were designed.The system is based on combination of the embedded design and diffraction grating spectral module,which can acquire the optical interference signal,realizing high-resolution spectrum dynamic demodulation.The experiments show that the sensing sensitivity of the 4 μm-thickness device can reach 398 pm/kPa at room temperature(25 ℃),and the system shows a high resolution of 35.5 Pa and good repeatability,which has potential in biomedical intraocular pressure sensing applications.
关键词
微腔压力传感/双光子三维打印技术/非接触式光学传感/液体压强测量系统Key words
microcavity pressure sensing/two-photon 3D printing technology/non-contact optical sensing/liquid pressure measurement system引用本文复制引用
出版年
2024
NETL
NSTL
万方数据