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微弱电容检测电路研究进展综述

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在精密测量、工业检测等领域中,由于待测电容变化量非常微小,可能达到皮法量级甚至更低,因此需要电容检测电路捕捉这些微小电容变化.本文分析了微弱电容检测的基础原理,区分了二极管式、调频式、交流式、充放电式和谐振式五种电容检测电路,通过测量精度、功耗等方面的对比分析,归纳了各类方案的特性优劣及其适用场景,并列举了典型应用案例.在综述当前电容检测方法的基础之上,探讨了当前微弱电容检测电路的局限性、需深化研究的方向及发展趋势,期望能够推动电容检测技术的进一步发展.
Review of research progress in weak capacitance detection circuits
In fields such as precision measurement and industrial testing,due to the extremely small changes in the capacitance to be measured,which may reach the order of picofarads or even lower,capacitance detection circuits are needed to capture these small capacitance changes.This article analyzes the basic principles of weak capacitance detection,distinguishing five types of capacitance detection circuits:diode type、frequency modulation type、AC type、charge discharge type and resonant type.Through comparative analysis of measurement accuracy、power consumption and other aspects,the characteristics,advantages,disadvantages and applicable scenarios of each scheme are summarized,and typical application cases are listed.On the basis of summarizing current capacitance detection methods,this paper explores the limitations,directions for further research and development trends of weak capacitance detection circuits,hoping to promote the further development of capacitance detection technology.

weak capacitance detectioncapacitive sensorcapacitance detection circuitresolutioncircuit application

刁瑗、贾远东、金新人、李红信、李宗峰

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兰州大学信息科学与工程学院 兰州 730000

兰州大学物理科学与技术学院 兰州 730000

中国科学院空间应用工程与技术中心 北京 100094

微弱电容检测 电容式传感器 电容检测电路 分辨率 电路应用

2024

电子测量技术
北京无线电技术研究所

电子测量技术

CSTPCD北大核心
影响因子:1.166
ISSN:1002-7300
年,卷(期):2024.47(23)