Research and Improvement of Superthin Film Vacuum Capacitance Coating Technology Performance
In order to meet the requirements of small volume,stable performance and suitable for high voltage circuit,the process performance of ultra-thin film vacuum capacitor coating is studied and designed in view of the problems of complex operation,many process parameters,large coating thickness and low breakdown voltage of domestic vacuum coating machines.The test results show that the new device has the advantages of allowing size films to be coated with low square resistance and high speed and maintaining the electrical properties of the original films to the greatest extent.At the same time,it also has the characteristics of ultra-film thickness of 0.8 μm,aluminum plating speed of up to 9～15 m/s,coating thickness of up to 0.6 Ω/m2,no thermal damage and mechanical damage,and doubling the breakdown voltage.It ensures the best quality performance of the product,further reduces the thickness of the film and the volume of the capacitor,and greatly improves the product quality and economic benefits.
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