Research on the α Particles Soft Error Mechanism and Accelerated Test Technolog
Based on the Am-241 radioactive source,the SRAM single particle effect test system is constructed.Combining α particles irradiation test,reverse analysis and Monte Carlo simulation,the soft error mechanism and accelerated test technology research of α particle in 65 nm and 90 nm SRAM device is carried out.The results show that α single particle turn over cross section of 65 nm SRAM under the condition of Am-241 accelerated testing is much higher than 90 nm SRAM.Based on inverse analysis results,the 3D simulation model of the device is constructed,the 65 nm SRAM devices use six layer metal wiring,the sensitive region size is 0.2 μm(x)×0.19 μm(y)×0.45 μm(z),and the critical charge is about 1 fC.Monte Carlo simulation results show that the deposition energy spectrum in sensitive region and flip cross section of single particle of 65 nm SRAM show obvious dependence of the incident angle.
α particlesoft errordeposition energy spectrum in sensitive regionflip cross section of single particle
NETL
NSTL
万方数据
维普
