An Epitaxial growth equipment EFEM system is described in the paper.By using components such as a lifting mechanism,a robotic arm,and a calibrator,combined with machine vision assisted judgment methods,an EFEM system for epitaxial growth equipment is designed.The system effectively improves wafer cleanliness and enhances the automation level of the equipment.The system has been applied and tested on relevant types,and can run reliably and efficiently.
关键词
外延生长/机械手/机器视觉/半导体设备前端模块
Key words
Epitaxial growth/Robotic arm/Machine vision/Equipment front end module(EFEM)
维普
万方数据