By introducing the principle of magnetron sputtering coating system,analyzes the problems of deposition rate and deposition uniformity in magnetron sputtering system,analyzes the influencing factors of deposition rate and deposition uniformity,and describes some fault phenomena often encountered in the process of equipment use,the causes of these faults are analyzed in detail.Finally,some suggestions on repairs and maintenance of magnetron sputtering system in daily use are put forward.Paying attention to daily maintenance and that can greatly reduce the failure rate of equipment.
关键词
磁控溅射/靶/沉积速率/沉积均匀性/设备维护
Key words
Magnetron sputter/Target/Deposition rate/Deposition uniformity/Maintenance of equipment
维普
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