According to the high requirements of current multi-target magnetron sputtering equipment,a set of target channel selector can effectively resist electromagnetic interference.The new target channel selection using tungsten contact high voltage ceramic relay channel switch,switched by I/O signal control channel,avoids the problem of weak serial communication resistance to electromagnetic inter-ference,and successfully applied in magnetron sputtering coating machine,after the user's long-term use,proved the stability and reliability of the equipment,the breakthrough realized the target channel selector independently controllable.
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