The geometric parameters,roughness and corrosion rate of semi-insulating GaAs wafer af-fected by the temperature and ratio of alkaline corrosion liquid for semi-insulating GaAs wafer are studied in this paper.According to the principle of alkaline corrosion,explaining the warpage im-provement of GaAs wafer by the corrosion liquid temperature,and the corrosion rate variation with temperature and ratio.The experiment results showed the TTV and roughness of GaAs wafer are more stable in alkaline corrosion solution.
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