In order to improve the accuracy and repeatability of loading material,measure and correct the offset of material automatically,an automatic calibration strategy is formulated,and the measurement system based on the four-quadrant sensor is constructed.Before loading on the stage,the position and posture offset of material are measured by four-quadrant sensor,then turn them into relative motion distance of stage,finally the stage is controlled movement automatically to compensate and take-over the material.The reliability of four-quadrant sensor and the feasibility of automatic correction strategy are verified by experiment,which is beneficial to improve transfer precision of material transfer system.
关键词
四象限传感器/位姿测量/自动校准策略/装载精度
Key words
Four-quadrant sensor/Measurement of position and posture/Strategy of alignment and correction automatically/Accuracy of loading
维普
万方数据