To ensure the accuracy and stability of the precision temperature control unit in semiconductor precision motion equipment,a time constant theoretical model of cooling water in electric motor is established to compute the max heat load gradient of electric motor,providing a basis for the selection of precision temperature control unit.The theoretical model shows that the thermal time constant of cooling water is mainly influenced by the motor structure,material,and flow rate of cooling water.The numerical simulation results show that the temperature change of cooling water over time accord with the time constant theoretical model.The cooling water time constant is independent of the motor thermal power,but increases as water flow decreases.The difference of time constant between numerical simulation and theoretical calculation is 27%.The experimental results are consistent with the numerical simulation results.the max difference of time constant between numerical simulations and experiments is 7%during the same operation status.
维普
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