A new Photomask robot fixture is designed and implemented,and successfully applied in the automatic production line of photomask manufacturing workshop.The new fixture adopts Simens V90 servo as the solution of the fixture actuator.At the same time,in order to meet the requirements of high cleanliness of the dust-free workshop and product safety protection,the fixture adopts the whole package design,and chooses two servo motors to drive the upper jaw and the lower jaw of the fixture respectively.Lower jaw B servo motor adopts Speed mode to realize absolute position control;EPOS mode is adopted in the servo motor of the upper clamp claw A to realize torque protection control.Scheme design,installation and use results show that the fixture is stable and reliable,to achieve a high degree of compatibility with different specifications of MASK products,to ensure product safety grasp at the same time can also maximize the reduction of product contact area,so as to reduce the pollution of the product,to meet the clean workshop high cleanliness and product safety grasp and transport needs.
维普
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