Semiconductor field regard as China key industry,currently 200 mm(8-inch)and 300 mm(12-inch)wafer production line have been established with characteristic of high power demand,therefore it is necessary to study with 10 kV and 20 kV technology.The article analyzes the power system of 10 kV and 20 kV respectively combined with short-circuit current calculation,summarizes the parameter selection and compares the corresponding space needs and structural column grid types with actual case analysis.Finally get the conclusion corresponding to two voltage.
关键词
电压等级/半导体/短路电流/设计要点
Key words
Voltage-grade/Semiconductor/Short-circuit current calculation/Design points conclusion
万方数据