During the development of SiC epitaxial growth equipment,it is found that the induction power supply has electromagnetic interference to other parts of the equipment,which affects the stability and authenticity of data acquisition and is not conducive to the stability of equipment control.In this paper,the interference phenomenon,interference mechanism and protection measures are discussed,analyzed and solved.
关键词
SiC外延/半导体设备/电磁干扰/防护措施
Key words
SiC epitaxy/Semiconductor equipment/Electromagnetic interference/Protective measure
维普
万方数据