Design of Electromagnetic Interference of Induction Power Supply and Protective Measures for SiC Epitaxial Growth Equipment
During the development of SiC epitaxial growth equipment,it is found that the induction power supply has electromagnetic interference to other parts of the equipment,which affects the stability and authenticity of data acquisition and is not conducive to the stability of equipment control.In this paper,the interference phenomenon,interference mechanism and protection measures are discussed,analyzed and solved.
SiC epitaxySemiconductor equipmentElectromagnetic interferenceProtective measure
万方数据
维普
