Application of GEM Communication Protocol in Thinning Equipment
SECS/GEM standard is a semiconductor industry standard used to manage communication between manufacturing equipment and factory host systems.By introducing the composition of SECS/GEM system,the communication state model,control state model and device state model of GEM are described in detail,and combined with the practical application requirements of thinning,the implementation of functions are listed such as state data,event sending,and alarm collection,etc.The result indicates that GEM communication standard has a good application in thinning equipment.
Semiconductor equipment communication standards(SECS)Device state modelEvent data collection
万方数据
维普
