SECS/GEM standard is a semiconductor industry standard used to manage communication between manufacturing equipment and factory host systems.By introducing the composition of SECS/GEM system,the communication state model,control state model and device state model of GEM are described in detail,and combined with the practical application requirements of thinning,the implementation of functions are listed such as state data,event sending,and alarm collection,etc.The result indicates that GEM communication standard has a good application in thinning equipment.
关键词
半导体设备通讯标准/设备状态模型/事件数据收集
Key words
Semiconductor equipment communication standards(SECS)/Device state model/Event data collection
维普
万方数据