Application and Research of FTA in Magnetron Sputtering Equipment Fault Diagnosis
This paper presents a fault diagnosis method of magnetron sputtering based on fault tree analysis,taking the abnormal Rs uniformity of magnetron sputtering equipment as an example,the whole process of FTA from tree building to qualitative analysis of fault is demonstrated.The result shows that FTA can locate fault quickly and accurately,and it is an effective fault diagnosis method.
Magnetron sputtering equipmentFault diagnosisFault tree analysisRs uniformity
NETL
NSTL
万方数据
