故障树分析法在磁控溅射台故障诊断中的应用研究
Application and Research of FTA in Magnetron Sputtering Equipment Fault Diagnosis
葛荣祥 1汤晓波 1王朋阳1
作者信息
- 1. 中国电子科技集团公司第五十五研究所,江苏 南京 210016
- 折叠
摘要
提出基于故障树分析的磁控溅射台故障诊断方法,以磁控溅射台方阻均匀性异常故障为例,演示了故障树分析法从建树到定性分析故障原因的全过程,结果表明故障树分析法能够快速准确地定位故障原因,是一种行之有效的复杂系统的故障诊断方法.
Abstract
This paper presents a fault diagnosis method of magnetron sputtering based on fault tree analysis,taking the abnormal Rs uniformity of magnetron sputtering equipment as an example,the whole process of FTA from tree building to qualitative analysis of fault is demonstrated.The result shows that FTA can locate fault quickly and accurately,and it is an effective fault diagnosis method.
关键词
磁控溅射台/故障诊断/故障树分析/方阻均匀性Key words
Magnetron sputtering equipment/Fault diagnosis/Fault tree analysis/Rs uniformity引用本文复制引用
出版年
2024
NETL
NSTL
万方数据