A Brief Discussion on Stiffness Design of Lithographic Machine Cable and Pipeline
The lithography machine is covered with wires and cables and environmental pipes,etc.These cables and pipes will produce additional stiffness,affecting the vibration isolation and shock absorber performance in the internal and external world.They also transmit dynamic forces,transferring external vibrations into the relatively static internal frame,affecting the engraving accuracy.It is difficult to evaluate how to reduce the stiffness of wiring harnesses connected with internal and external structures.The pressure rod instability problem analysis method is used to analyze the typical wiring harnesses,and the changes of the reaction force and stiffness of wiring are respectively affected by the deflection,height and Angle of wiring.By setting up a test platform for the stiffness of cables and pipelines,the typical transmission methods of pipelines are tested.It is concluded that the linear transmission is prohibited,the transmission height is as large as possible,and the transmission form is as large as possible in the form of 180° bending.Therefore,it provides guidance and suggestions for the standard operation of wiring and piping,and reduces the influence of wiring and piping on the performance of the whole machine to a low level.
Lithography machineHarness stiffnessThe pressure rod instabilityVibrationDynamic performance
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