Application of Magnetic Floating Planer Motor in Ultra-Precision Stage
In order to enhance the throughput and the performance of the overall semiconductor equipment,the maker of them adopt many new methods and new technology.This paper introduces the three-dimensional model of ultra-precision stage、and the principle、composition、characteristics、technical index and application prospect of maglev planar motor.The maglev planar motor is used in the ultra-precision stage,which has the advantages of simple structure,high speed and high acceleration,high precision and no pollution.It not only meets the needs of the current semiconductor equipment technology development,but also meets the needs of the future semiconductor equipment technology development.
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