The design of the extraction system for ion beam extraction in SiC ion implantor is introduced.The extraction system is a three-dimensional adjustable moving part,the electrode plate of the extraction system is accurately adjustable in three directions under the driving action of the X,Y and Z three-axis servo motor;under the action of the double high-pressure electric fields of the extraction high pressure and the extraction suppression high pressure loaded on the electrode plate,the optimal ion beam extraction in the arc chamber under different elements or different discharge states is realized.
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