Through the study of resistance type silicon carbide crystal growth equipment and process,several methods of temperature control in resistance type crystal growth furnace are analyzed.Through the study of key technologies in temperature control,a temperature control scheme suitable for large-size resistance type silicon carbide crystal growth furnace is proposed,and it is verified through practice that it meets the requirements for precise temperature field stability control in silicon carbide crystal growth.
关键词
碳化硅/晶体生长/温度控制
Key words
Silicon carbide/Crystal growth/Temperature control
维普
万方数据