In order to meet the different pressure requirements of each chamber in the operation of SiC Epitaxial Equipment and to achieve stable control of process pressure,the pressure obtaining system of SiC Epitaxial Equipment is divided into process pressure system,high-vacuum pressure system,over-pressure protection system and acid discharge system,and the pressure obtaining system has been designed through reasonable calculations and selections,and the key process states have been compared in the tests.After actual process verification,the pressure obtaining system has been successfully applied to SiC Epitaxial Equipment,and the system has complete functions and stable performance.
关键词
碳化硅/外延/压力系统/真空压力系统
Key words
SiC/Epitaxial/Pressure system/Vacuum pressure systems
维普
万方数据