In order to solve the problem of Mask-Aligner markers in the process of actual production,design a cylinder control structure.With the microscope lifting and microscope light path,form a set of suitable for Mask-Aligner of Dark Field Alignment Technology with hardware and software technology,realize the dark field mask alignment cost reduction,improve the efficiency of close contact exposure machine alignment and stability.
关键词
曝光机/暗场对准/误差补偿
Key words
Mask-Aligner/Dark field alignment/Error compensation
维普
万方数据