Dark Field Alignment Technology Based on Mask-Aligner
In order to solve the problem of Mask-Aligner markers in the process of actual production,design a cylinder control structure.With the microscope lifting and microscope light path,form a set of suitable for Mask-Aligner of Dark Field Alignment Technology with hardware and software technology,realize the dark field mask alignment cost reduction,improve the efficiency of close contact exposure machine alignment and stability.
Mask-AlignerDark field alignmentError compensation
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维普
