摘要
芯片拼接系统用长跨距运动龙门气浮定导轨的材质、长度尺寸和加工精度直接决定了设备稳定性、拼接能力和拼接精度.通过计算机辅助设计与分析软件进行了长跨距运动龙门碳化硅陶瓷气浮定导轨的静力学仿真、结构优化和校核,对芯片拼接系统用碳化硅陶瓷气浮定导轨的研发设计起到了很好的理论指导作用.
Abstract
In the chip splicing system,the material,length and accuracy of the long-span gantry air floating beam directly determine the stability,splicing ability and splicing accuracy of the equipment.In this paper,statics simulation,structure optimization and check are carried out based on CAD and CAE software,which plays an important role in the design of long-span gantry air floating beam.
维普
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