The basic structure and characteristics of piezoelectric ceramic actuator and sensor are intro-duced in this paper.The fabrication process and main manufacturers of piezoelectric stack structure are summarized in this paper,the development and structural characteristics of active vibration reduction using piezoelectric ceramics for precision equipment are described.The type selection and dynamic force calculation of piezoelectric stack are carried out for typical vibration absorption structure,and the finite element modeling and stiffness simulation analysis of vibration absorption structure are carried out.
关键词
精密设备/压电陶瓷/主动减振
Key words
Precision equipment/Piezoelectric/Active vibration control
维普
万方数据