为了实现对外延设备EFEM(Equipment Front End Module)模块的控制,阐述了一种基于Modbus通信协议的自动化控制系统.主要讨论了系统的硬件组成,并详细分析了Modbus RTU协议工作方式,同时,在软件层面上说明了接口控制的协议指令定义规则与常规运行流程.
Abstract
In order to realize the control of EFEM(Equipment Front End Module)of epitaxial equipment,an automatic control system based on Modbus communication protocol is described.The hardware composition of the system is discussed,the working mode of the Modbus RTU protocol is analyzed in detail,and the protocol instruction definition rules and general operation process of interface control are explained at the software level.
关键词
接口协议/Modbus通信协议/机器人/设备前端模块(EFEM)
Key words
Interface protocols/Modbus communication protocol/Robot/EFEM
维普
万方数据