There are many factors that affect the thickness and uniformity of spray coating.The main factors are photoresist concentration(affecting liquid viscosity),photoresist flow,nitrogen pressure,scanning speed,track line spacing,nozzle height,stacking times,chuck temperature,etc.In addition,the size of cavity exhaust,nitrogen flow,nozzle type(atomization method and effect),baking temperature and time could also affect the process effect of spray coating.In order to solve the problem of poor uniformity caused by rough surface when spray coating is applied to the substrate,a large number of process explorations are carried out by means of orthogonal test.At the same time,in order to better understand the process indicators and spraying process,the spray coating equipment is briefly introduced.The experimental results show that under the optimal process conditions,the coating thickness is at 5 μm,the uniformity can reach 4.8%.
Lithography processSpray coatingUniformityOrthogonal test
万方数据
维普
