Based on the study of the function requirements and process flow of ion beam surface processing equipment,a control system with automatic vacuum,temperature control,film transfer,coating,etching and other functions is designed,and the function of each module of the control system is described in detail.The control system has been verified by the flow sheet of the production line,which runs stably and meets the requirements of process control such as coating and etching of ion beam processing equipment.
关键词
离子束溅射沉积/离子束刻蚀/离子束加工/控制系统
Key words
Ion beam sputter deposition/Ion beam etching/Ion beam processing/Control system
维普
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