Research and Design of Control System for Ion Beam Surface Processing Equipment
Based on the study of the function requirements and process flow of ion beam surface processing equipment,a control system with automatic vacuum,temperature control,film transfer,coating,etching and other functions is designed,and the function of each module of the control system is described in detail.The control system has been verified by the flow sheet of the production line,which runs stably and meets the requirements of process control such as coating and etching of ion beam processing equipment.
Ion beam sputter depositionIon beam etchingIon beam processingControl system
万方数据
维普
