Automatic probe test system is one of key equipment in the front end inspection process of silicon wafer semiconductor,which is used to measure various electrical performance parameters of different types of devices(such as static parameters of power devices,S parameters of microwave devices,etc.).In the actual process line,due to human error and external environment interference and other factors,the probe station must be aligned before the test.In order to solve this problem,an innovative method of wafer automatic aligning based on marked points image recognition is proposed in this paper.After verification,the method has high calibration accuracy and strong process adaptability.
关键词
探针测试系统/晶圆扫正/图像识别/测试工艺
Key words
Probe test system/Wafer aligning/Image recognition/Test technology
维普
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