In the horizontal measurement system of semiconductor manufacturing equipment,coordi-nate system transformation calibration can effectively reduce the conversion deviation between materi-al mergers and improve the positioning accuracy of materials.This paper proposes a coordinate sys-tem deviation calibration technique based on signal processing.The differential fitting method is used to detect the calibration marker's position,and a calibration deviation family is established base on multiple markers on the calibration board,thus compensating for the measurement system.Experi-mental results demonstrate that this method can effectively enhance the accuracy of model detection,reduce noise interference,and exhibit high stability and adaptability.
关键词
坐标系转换/偏差标定/差分拟合
Key words
Coordinate system transformation/Deviation calibration/Phase coherence
维普
万方数据