As an important part of the exchange robot,the changeover mechanism plays a critical role in the reliability,safety and deformation of the reticle in the reticle transmission process.By comprehensively considering the adsorption performance,sealing performance and influence on the deformation of the reticle of the changeover mechanism,a new type of compliance changeover mechanism is designed,the influence of the compliance changeover mechanism on the deformation of the reticle is analyzed by finite element simulation,and a test bench is built to test the adsorption performance and sealing performance of the compliance changeover mechanism.The results show that the maximum deformation of the reticle is 0.85 μm,and the adsorption force is 52.39 N,the falling time of the reticle is 188 s,and the pressure drop is 0.006 7 MPa/20 s,the results all meet the requirement of the index.
关键词
柔性吸附装置/有限元分析/掩模版变形/吸附性能试验/密封性能试验
Key words
Compliance changeover mechanism/Finite element analysis/Reticle deformation/Ad-sorption performance test/Sealing performance test
维普
万方数据