Research Progress of Silicon-Based Optical Waveguide Beam Splitter
As an important device in photonic integrated circuit,optical waveguide devices can be divided into active device with modulation function and passive device with static characteristic.Optical waveguide beam splitter is one of the important passive devices in optical communication networks.It is widely used in optical communication systems to realize efficient and fast information transmission.Silicon-based materials have become the main sub-strate materials for photonic integrated circuits due to their superior photoelectric properties and compatibility with semiconductor processes in integrated circuits.In this study,the current research status of silicon optical waveguide beam splitters is analyzed,the directional coupler,multimode interference coupler and subwavelength grating are summarized,and the dimensions and performance of different types of silicon optical waveguide beam splitters are dis-cussed and compared.It provides a new idea for developing low loss,small size and wide band optical waveguide beam splitte.
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维普
