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β-Ga2O3的p型掺杂研究进展

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β-Ga2O3具有超宽禁带宽度、高击穿场强、较高的巴利加优值等优点使其成为一种新兴半导体材料,在高功率电子器件、气体传感器、日盲紫外探测器等方面有着极大的应用潜力,但p型掺杂难的问题成为了β-Ga2O3发展的巨大障碍.本文首先简要概述了β-Ga2O3的优点,并介绍了其晶体结构和基本性质.其次,说明了β-Ga2O3 的本征缺陷,尤其是氧空位对导电性能的影响.然后,详细讨论了β-Ga2O3 p型掺杂的研究现状,包括p型掺杂困难的原因和N掺杂、Mg掺杂、Zn掺杂、其他受主元素掺杂、两种元素共掺杂以及其他方法.最后,总结并对β-Ga2O3未来的发展进行了展望.
Research Progress of p-type Doping of β-Ga2 O3
β-Ga2O3 has many advantages such as wide bandgap,high breakdown field strength,and high Baliga's figure of merit,making it an emerging semiconductor material with great potential for high-power electronic devices,gas sensors,and solar-blind ultraviolet detectors.However,the challenge of achieving p-type doping poses a major obstacle to the development of β-Ga2O3.Firstly,the advantages of β-Ga2O3 have been outlined briefly,and its struc-ture and basic properties have been introduced as well.Secondly,the effect of the intrinsic defects of β-Ga2O3 on electrical conductivity has been discussed detailed,especially,for the oxygen vacancy.And then,the current re-search status of p-type doping in β-Ga2O3 has been discussed including N,Mg,Zn and other acceptor elements dop-ing,co-doping with two elements and other methods.Additionally,the reasons for difficulty in p-type doping have been presented.Finally,this review discussed and looked forward to future developments for β-Ga2O3.

β-Ga2O3intrinsic defectsp-type dopingwide bandgap semiconductorssemiconductors

何俊洁、矫淑杰、聂伊尹、高世勇、王东博、王金忠

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哈尔滨工业大学 材料科学与工程学院,黑龙江 哈尔滨 150001

β-Ga2O3 本征缺陷 p型掺杂 宽禁带半导体 半导体

国家自然科学基金国家重点研发项目

621740422019YFA0705201

2024

发光学报
中国物理学会发光分会,中国科学院长春光学精密机械与物理研究所

发光学报

CSTPCD北大核心
影响因子:1.301
ISSN:1000-7032
年,卷(期):2024.45(4)
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