AlGaN Based Deep Ultraviolet LED for Inactivating Coxsackie Virus
To explore the virus inactivation efficiency of AlGaN based LED with different light emission wave-lengths fabricated on high-temperature annealed (HTA) AlN templates,7 groups of AlGaN based LEDs were fabri-cated with emission wavelengths varied from 257 nm to 294 nm,and the inactivation efficiency for Coxsackie virus was explored.The experimental results show that the threading dislocation density of HTA AlN templates can be de-creased to 1.33×107 cm-2,which is beneficial for fabricating AlGaN based LED.The Coxsackie virus inactivation rate is more than 99.90% for the AlGaN based LED with central emission wavelength between 257 nm and 278 nm under the experimental conditions (inactivation distance of 2 cm,UV irradiation time of 30 s),while the Coxsackie virus inactivation rate only reaches 99.47% and 96.15% for the LED with central emitting wavelength of 288 nm and 294 nm,respectively.According to the above results,AlGaN based LEDs with emission wavelength between 257 nm and 278 nm are suitable for application in virus sterilization field,while the LED with wavelength longer than 288 nm has poor efficacy in virus sterilization under the experimental conditions.
high temperature annealAlN templateAlGaNLEDvirus inactivation