Charge Effect and Elimination Method of Non-conductive Powder Samples in AES
To obtain the correct spectrum of AES when analyzing insulating samples,the change effect is an important influ-encing factor.In the this paper,the AES sample preparation method for analyzing Al2O3 powder was proposed.By compar-ing several experiments to reduce the charge effect,the method of covering aluminum conductive thin was selected.This method is simple efficient and reduces the influence of charge effect.By comparing the molar ratio Al2O3,a good matching degree is obtained,and the detection results of this method are good.
AEScharge effectAl2O3 powderelectrical conductivityconducting film
万方数据
维普
