Effect of Sintering Temperature on the Surface Morphology and Mechanical Properties of ZrO2 Films
Zirconia films,sintered at 300 ℃,400 ℃ and 500 ℃,were prepared on glass surface by solgel method.The effect of sintering temperature on the surface morphology and mechanical properties of ZrO2 films were characterized by means of X-ray diffraction,atomic force microscopy and nanoindenter.The results showed that,with the increase of sintering temperature,the crystal structure of ZrO2 from small amount of monoclinic phase gradually transfer to the monoclinic phase and tetragonal phase mixture.The surface morphology of the ZrO2 films were gradually improved,the surface roughness of the films and the particle size were decreased.Mter sintering at 300 ℃,400 ℃ and 500 ℃,the surface roughness of the films were about 10.5 nm,7.2 nm and 5.6 nm,the grain size of ZrO2 were about 188 nm,153 nm and 130 nm,respectively.Furthermore,the hardness and elastic modulus of the ZrO2 films were significantly improved.The elastic modulus of the films were about 89.6 GPa,114.2 GPa and 128.9 GPa,the hardness of the films were about 7.6 GPa,10.3 GPa and 15.1 GPa,respectively.
国家科技期刊平台
NSTL
万方数据
维普
