CaO-B2O3-SiO2微晶玻璃的制备及介电性能
Preparation and Dielectric Properties of CaO-B2O3-SiO2 Glass-Ceramics
卫志洋 1王晓东 1苏腾 1陈欢乐 1高峰 1苗洋1
作者信息
- 1. 太原理工大学材料科学与工程学院,太原 030024
- 折叠
摘要
低介电常数、低介电损耗的微晶玻璃是制造低温共烧陶瓷基板的重要材料.本文采用熔融水淬法制备了CaO-B2O3-SiO2(CBS)微晶玻璃,重点研究了 m(CaO)/m(SiO2)质量比、B2O3含量对CBS微晶玻璃介电性能的影响.结果表明:CBS 微晶玻璃的主要晶相有 Ca3Si3O9、Ca2B2O5、CaB2O4、SiO2 和 Ca2SiO4.随着 m(CaO)/m(SiO2)质量比的增加,介电常数增加,介电损耗先降低后增加;硅灰石相的增多使介电损耗从2.87 × 10-3降到1.36 × 10-3,介电损耗随着SiO2、Ca2B2O5和CaB2O4含量的增加而增大.随着B2O3含量的增加,介电常数先增加后减少,而介电损耗则相反.当m(CaO)/m(SiO2)质量比为0.89、B2O3含量为15％(质量分数)时,在900 ℃烧结3 h,CBS微晶玻璃的热膨胀系数为7.16 ×10-6 ℃-1,介电常数为5.85,介电损耗为1.37 × 10-3(10 GHz).
Abstract
Glass-ceramics with low dielectric constant and low dielectric loss is an important material for the manufacture of low temperature cofired ceramic substrates.CaO-B2O3-SiO2(CBS)glass-ceramics was prepared by melt-water quenching method,and the effects of m(CaO)/m(SiO2)mass ratio and B2O3 content on the dielectric properties of CBS glass-ceramics were studied.The results show that the main crystalline phases of CBS glass-ceramics are Ca3Si3O9,Ca2B2O5,CaB2O4,SiO2 and Ca2 SiO4.The dielectric constant increases,the dielectric loss decreases first and then increases with the increase of m(CaO)/m(SiO2)mass ratio.The increase of wollastonite phase decreases the dielectric loss from 2.87 x 10-3 to 1.36 x 10-3.The dielectric loss increases with the increase of SiO2,Ca2B2O5 and CaB2O4 content.With the increase of B2O3 content,the dielectric constant increases first and then decreases,and the dielectric loss is reversed.When m(CaO)/m(SiO2)mass ratio is 0.89 and B2O3 content is 15％(mass fraction),the coefficient of thermal expansion is 7.16 x 10-6 ℃-1,the dielectric constant is 5.85,and the dielectric loss is 1.37 × 10-3(10 GHz)after sintering at 900 ℃ for 3 h.
关键词
CaO-B2O3-SiO2/微晶玻璃/介电常数/介电损耗/微观结构/低温共烧Key words
CaO-B2O3-SiO2/glass-ceramics/dielectric constant/dielectric loss/microstructure/low temperature co-firing引用本文复制引用
基金项目
国家留学基金委山西省研究项目(2022-042)
山西省重点研发计划项目(202102030201006)
山西省基础研究计划(202203021221059)
出版年
2024
国家科技期刊平台
NSTL
万方数据