非接触点胶打印用ZnO-SnO2复合气敏墨水的制备及气敏性能研究
Preparation and Gas-Sensitive Performance of ZnO-SnO2 Composite Gas-Sensitive Inks for Non-Contact Dispenser Printing
王建搏 1贾明昊 1王兴锋 1雷鸣 2沈杰 3金伟1
作者信息
- 1. 武汉理工大学硅酸盐建筑材料国家重点实验室,武汉 430070
- 2. 武汉微纳传感技术有限公司,武汉 430079
- 3. 武汉理工大学材料科学与工程学院,武汉 430070
- 折叠
摘要
非接触点胶打印是一种新型、高精度、无模板、低成本的成膜技术,墨水的理化性质是决定打印薄膜质量的关键,对微电子器件性能有着重要影响.本文采用聚乙二醇400(PEG400)作为分散剂取代传统的高分子量分散剂,以乙二醇和丙三醇为溶剂、ZnO-SnO2复合气敏材料为功能相制备高性能气敏墨水,并利用非接触点胶技术在基于微电子机械系统(MEMS)的微热板上打印ZnO-SnO2复合气敏薄膜.根据墨水的黏度及悬浮稳定性,分析了PEG400含量和固含量对墨水理化性质的影响,通过SEM观察薄膜的微观形貌,研究结果表明,当固含量为15％(质量分数,下同)、PEG400含量为6％时,复合气敏墨水具备可打印性及低温烧结成膜特性,制备的复合气敏薄膜厚度均匀,表面平整,边缘规整,对丙酮气体有良好的响应.
Abstract
Non-contact dispenser printing is a novel,high-precision,template-free,and inexpensive film-forming technique.The quality of printed films is mostly determined by the physicochemical characteristics of the ink,which also have a big effect on the performance of microelectronic devices.In this work,high-performance gas-sensitive ink was made with ZnO-SnO2 composite gas-sensitive materials as functional phases and ethylene glycol and glycerol as solvents,employing PEG400 as dispersion in place of conventional high molecular weight dispersants.ZnO-SnO2 composite gas-sensitive films were printed on micro-electromechanical system(MEMS)micro-hotplates using non-contact dispenser method.The effects of PEG400 content and solid content on the physical and chemical properties of ink were discussed by measuring the viscosity,and suspension stability of the ink.The microscopic morphology of the film was observed by SEM.The results show that the composite gas-sensitive ink possesses printability and low-temperature sintering film-forming properties when the solid content is 15％(mass fraction,the same here in after)and the PEG400 content is 6％,and the prepared composite gas-sensitive film is uniform in thickness,with a smooth surface,regular edges,and a good response to acetone gas.
关键词
非接触点胶打印/复合气敏墨水/ZnO-SnO2/PEG400/微热板/气体传感器Key words
non-contact dispenser printing/composite gas-sensitive ink/ZnO-SnO2/PEG400/micro-hotplate/gas sensor引用本文复制引用
出版年
2024
国家科技期刊平台
NSTL
万方数据