首页|非接触点胶打印用ZnO-SnO2复合气敏墨水的制备及气敏性能研究

非接触点胶打印用ZnO-SnO2复合气敏墨水的制备及气敏性能研究

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非接触点胶打印是一种新型、高精度、无模板、低成本的成膜技术,墨水的理化性质是决定打印薄膜质量的关键,对微电子器件性能有着重要影响。本文采用聚乙二醇400(PEG400)作为分散剂取代传统的高分子量分散剂,以乙二醇和丙三醇为溶剂、ZnO-SnO2复合气敏材料为功能相制备高性能气敏墨水,并利用非接触点胶技术在基于微电子机械系统(MEMS)的微热板上打印ZnO-SnO2复合气敏薄膜。根据墨水的黏度及悬浮稳定性,分析了PEG400含量和固含量对墨水理化性质的影响,通过SEM观察薄膜的微观形貌,研究结果表明,当固含量为15%(质量分数,下同)、PEG400含量为6%时,复合气敏墨水具备可打印性及低温烧结成膜特性,制备的复合气敏薄膜厚度均匀,表面平整,边缘规整,对丙酮气体有良好的响应。
Preparation and Gas-Sensitive Performance of ZnO-SnO2 Composite Gas-Sensitive Inks for Non-Contact Dispenser Printing
Non-contact dispenser printing is a novel,high-precision,template-free,and inexpensive film-forming technique.The quality of printed films is mostly determined by the physicochemical characteristics of the ink,which also have a big effect on the performance of microelectronic devices.In this work,high-performance gas-sensitive ink was made with ZnO-SnO2 composite gas-sensitive materials as functional phases and ethylene glycol and glycerol as solvents,employing PEG400 as dispersion in place of conventional high molecular weight dispersants.ZnO-SnO2 composite gas-sensitive films were printed on micro-electromechanical system(MEMS)micro-hotplates using non-contact dispenser method.The effects of PEG400 content and solid content on the physical and chemical properties of ink were discussed by measuring the viscosity,and suspension stability of the ink.The microscopic morphology of the film was observed by SEM.The results show that the composite gas-sensitive ink possesses printability and low-temperature sintering film-forming properties when the solid content is 15%(mass fraction,the same here in after)and the PEG400 content is 6%,and the prepared composite gas-sensitive film is uniform in thickness,with a smooth surface,regular edges,and a good response to acetone gas.

non-contact dispenser printingcomposite gas-sensitive inkZnO-SnO2PEG400micro-hotplategas sensor

王建搏、贾明昊、王兴锋、雷鸣、沈杰、金伟

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武汉理工大学硅酸盐建筑材料国家重点实验室,武汉 430070

武汉微纳传感技术有限公司,武汉 430079

武汉理工大学材料科学与工程学院,武汉 430070

非接触点胶打印 复合气敏墨水 ZnO-SnO2 PEG400 微热板 气体传感器

国家自然科学基金

62171331

2024

硅酸盐通报
中国硅酸盐学会 中材人工晶体研究院

硅酸盐通报

CSTPCD北大核心
影响因子:0.698
ISSN:1001-1625
年,卷(期):2024.43(10)