Human Factors-related Risks and Challenges in the Semiconductor Manufacturing Process
The semiconductor production process is complex,which requires a high degree of automation and high operation accuracy.Workers engaged in the production process face many physiological and psychological risks.Firstly,from the perspective of human factors,the core risks of human factors in the semiconductor production process were extracted based on the description of the human work during the production process.Secondly,the risks were organized into categories based on physiology,cognition,and organizational aspects.Also,the factors that caused these risks were summarized from literature on tasks,systems,and environments.Then,a model of human factors risks and challenges in semiconductor industry production and their influencing factors was proposed.Furthermore,thorough analyses from the literature review were respectively provided for each of the three categories of risks and their influencing factors.Finally,some suggestions on the research directions of human factors engineering focusing on the domestic semiconductor production industry were proposed,including work posture training methods,workers'physical and mental health assessment,workplace and production line layout design,human-computer interaction design,etc.,in order to promote the development of China's semiconductor industry.