As the output signal of piezoresistive MEMS sensor is extremely weak,it is easy to be dis-turbed by the noise of the test environment,and an external conditioning circuit is needed.In order to improve the signal acquisition accuracy,a design scheme of the piezoresistive sensor signal ASIC condi-tioning circuit is proposed to realize the amplification and filtering functions of the output signal.The test results show that the control circuit can adjust the gain in the range of 10～200 times,and the adjustment range of-0.5 dB cutoff frequency covers 0.1～20 kHz.In the low frequency range,the equivalent noise of the chip is 45 nV/√Hz.By combining the conditioning circuit with the sensor,the improved test system has fast response speed,better filtering effect,test accuracy is better than 5%,and the sen-sor nonlinearity is 5.4%.At the same time,the size and volume of the conditioning circuit are also small,and the power consumption is low,which is of great significance for the follow-up research on the sensor test system.
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