一种压阻式传感器信号调理电路的设计
Design of a piezoresistive sensor signal conditioning circuit
李艳 1石云波 1赵锐 1张志峰2
作者信息
- 1. 中北大学 电子测试技术重点实验室,山西 太原 030051
- 2. 山西北方机械制造有限责任公司,山西 太原 030051
- 折叠
摘要
由于压阻式MEMS传感器输出信号极其微弱,极易受到测试环境的噪声干扰,还需要外接调理电路,为了提升信号的采集精度,提出一种压阻式传感器信号ASIC 调理电路的设计方案,实现输出信号的放大、滤波功能.测试结果表明,调理电路可以在 10～200 倍的范围内调节增益,-0.5 dB截止频率调节范围覆盖0.1～20 kHz;低频范围内,芯片的等效噪声为45 nV/√Hz.将调理电路与传感器相结合,改进的测试系统响应速度快,滤波效果更好,测试精度优于 5%,传感器非线性为5.4%.同时,调理电路的大小和体积也很小,功耗低,对后续继续研究传感器测试系统有重要意义.
Abstract
As the output signal of piezoresistive MEMS sensor is extremely weak,it is easy to be dis-turbed by the noise of the test environment,and an external conditioning circuit is needed.In order to improve the signal acquisition accuracy,a design scheme of the piezoresistive sensor signal ASIC condi-tioning circuit is proposed to realize the amplification and filtering functions of the output signal.The test results show that the control circuit can adjust the gain in the range of 10～200 times,and the adjustment range of-0.5 dB cutoff frequency covers 0.1～20 kHz.In the low frequency range,the equivalent noise of the chip is 45 nV/√Hz.By combining the conditioning circuit with the sensor,the improved test system has fast response speed,better filtering effect,test accuracy is better than 5%,and the sen-sor nonlinearity is 5.4%.At the same time,the size and volume of the conditioning circuit are also small,and the power consumption is low,which is of great significance for the follow-up research on the sensor test system.
关键词
压阻式/信号调理/放大/滤波/灵敏度Key words
piezoresistive/signal conditioning/amplification/filtering/sensitivity引用本文复制引用
基金项目
山西省基础研究计划面上项目(202103021224206)
出版年
2024
NETL
NSTL
万方数据