Research on line voltage measurement method based on MEMS sensor
MEMS electric field sensor has small size and low power consumption,which can effec-tively reduce the measurement volume and cost of the device in non-invasive voltage measurement tech-nology,and meet the current distributed measurement needs.Therefore,a voltage measurement scheme based on MEMS electric field sensor is designed in this paper.Firstly,the working principle and capaci-tance voltage division principle are introduced.Secondly,the voltage measurement scheme is designed based on the structure characteristics of the sensor,and its equivalent circuit model is further analyzed.The results show that the designed measurement scheme can accurately invert the power frequency voltage within 1~10 kV,and the maximum deviation of the measured value is 2.21%.The non-intrusive volt-age measurement scheme proposed in this paper is easy to carry and can measure the line voltage stably,providing a reliable technical means for the real-time monitoring of overhead line voltage.It can provide reliable data support for the real-time measurement of line electrical parameters.
MEMS sensorcoupling capacitancevoltage measurementtransmission line