Performance Improvement of ThermocoupleTemperature Sensors for Liquid Steel Temperature Measurement
tungsten-rhenium thermocouple temperature sensors are easily damaged in liquid steel.To address this issue,ZrO2 thin films were prepared by radio frequency magnetron sputtering on tungsten-rhenium thermocouple wires using zirconia targets.Orthogonal experiments were designed to select the sputtering process parameters,and liquid steel temperature measurement experiments were conducted.The experimental results show that the main and secondary factors affecting the atomic concentration of the coating are sputtering power,thin film pressure,and bias voltage.The optimal parameters for sput-tering are a sputtering power of 200 W,a thin film pressure of 1.2 Pa,and a bias voltage of 150 V.The preparedliquid steel temperature sensor has good stability.Compared to the uncoated reference group,the temperature measurement time was up to 327.4 seconds and has increased by about 485%.
temperature measurement sensortungsten-rhenium thermocouplezirconia coatingmag-netron sputtering
万方数据
维普
