Analysis on Positioning Accuracy for Ion Beam Figuring
On the basis of the modeling of the tangential positioning error effect on the processing residual errors, it is found that the effect is related with the gradient of the optical surface. Particularly, the tangential positioning error effect on different frequencies is analyzed and simulated to verify that the residual error is proportional to the relative positioning error. The KDIBF1600 machine error model is established to get the value of the tangential positioning error, and the design accuracy of the machine is evaluated, which meets the processing requirements.
ion beam figuringpositioning errorform gradienterror-modeling
NETL
NSTL
万方数据
维普
