研制出一种多谱段时间延迟积分(Time Delay Integration,TDI)线列制冷红外探测器.探测器阵列规模达到1024×4×6,像元尺寸为20 μm×20μm.读出电路具有分谱段将转换成电信号的模拟信号串行输出、边积分边读出(In-tegrate While Reading,IWR)、TDI以及盲元/闪元剔除功能.探测器芯片采用碲镉汞外延材料制造光伏二极管阵列,封装采用高可靠性的全金属真空杜瓦,制冷采用小型分置式斯特林制冷机.整机具备体型小、功耗低、响应波段宽、集成度高、启动时间短等优点.测试结果表明,器件各谱段的盲元率小于1％,各谱段的噪声等效温差(Noise Equivalent Temperature Difference,NETD)小于 30 mK,各谱段的动态范围大于70 dB,各谱段的响应率非均匀性小于5％,各谱段的非线性度小于2％,器件行频大于20 kHz.
A Multispectral TDI Line Array Cooled Infrared Detector
A multispectral time delay integration(TDI)line array cooled infrared detector is developed.The detector array has a scale of 1024×4×6 and a pixel size of 20 μm×20 μm.The readout circuit has the func-tion of serial output of analog signals that are converted into electrical signals through spectral segmentation,and integrating while reading(IWR),TDI,and blind/flash element elimination.The detector chip is made of HgCdTe epitaxial material to manufacture a photovoltaic diode array,packaged with a highly reliable all-metal vacuum dewar,and cooled using a small split Stirling refrigerator.The whole machine has advantages such as small size,low power consumption,wide response band,high integration,and short startup time.The test results show that the blind element rate of each spectral segment of the device is less than 1％,and the noise equivalent temperature difference(NETD)is less than 30 mK,the dynamic range of each spectral segment is greater than 70 dB,the non-uniformity of the response rate of each spectral segment is less than 5％,the non-linearity of each spectral segment is less than 2％,and the device line frequency is greater than 20 kHz.
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