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碲锌镉晶片的X射线貌相研究

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X射线貌相测试是一种针对样品晶体结构完整性的非破坏性检测手段.通过高分辨率数字式X射线形貌仪对碲锌镉(111)晶片表层进行貌相测试,通过缺陷形式及密度来评价碲锌镉晶体质量.经过大量数据分析统计出5种常见于碲锌镉晶体中的缺陷:划痕、空洞、小角晶界、孪晶和杂晶.结合具体工艺阐述和分析了5类缺陷的形成原因,并针对碲锌镉晶体生长和加工工艺提出了建设性意见.这有利于获取高质量衬底材料,进而提升外延碲镉汞膜的质量.
X-Ray Topography Study of CdZnTe
X-ray morphology testing is a non-destructive testing method for detecting the integrity of the crys-tal structure of samples.Surface morphology testing of tellurium zinc cadmium(111)wafers was conducted u-sing a high-resolution digital X-ray morphometer,and the quality of tellurium zinc cadmium crystals was eval-uated by defect form and density.After extensive data analysis,five common defects in tellurium zinc cadmium crystals have been identified:scratches,voids,small angle grain boundaries,twinning and impurities.Based on specific processes,the reasons for the formation of 5 types of defects were explained and analyzed,and con-structive suggestions were put forward for the growth and processing technology of tellurium zinc cadmium crystals,which is conducive to obtaining high-quality substrate materials and improving the quality of epitaxial tellurium cadmium mercury films.

CdZnTeX-raydefectmorphology

李乾、韩岗、牛佳佳、李达、刘江高、折伟林

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华北光电技术研究所,北京 100015

碲锌镉 X射线 缺陷 貌相

2024

红外
中国科学院上海技术物理研究所

红外

影响因子:0.317
ISSN:1672-8785
年,卷(期):2024.45(8)