X-ray morphology testing is a non-destructive testing method for detecting the integrity of the crys-tal structure of samples.Surface morphology testing of tellurium zinc cadmium(111)wafers was conducted u-sing a high-resolution digital X-ray morphometer,and the quality of tellurium zinc cadmium crystals was eval-uated by defect form and density.After extensive data analysis,five common defects in tellurium zinc cadmium crystals have been identified:scratches,voids,small angle grain boundaries,twinning and impurities.Based on specific processes,the reasons for the formation of 5 types of defects were explained and analyzed,and con-structive suggestions were put forward for the growth and processing technology of tellurium zinc cadmium crystals,which is conducive to obtaining high-quality substrate materials and improving the quality of epitaxial tellurium cadmium mercury films.