Design of digital wave sensor based on MEMS technology
In order to improve the performance of wave sensor and realize the miniaturization of sensor,a wave sensor based on Micro Electro Mechanical Systems(MEMS)technology was designed.In this design,the wave signal is filtered by digital filtering algorithm,and the vertical acceleration is obtained by attitude correction.The vertical displacement is obtained by quadratic integration of the processed acceleration data in the frequency domain,and the characteristic data of wave height is calculated by using the lower cross-zero method.In order to check the accuracy of the design,the laboratory wave simulation test bench test and sea comparison test have been carried out.The results of sea comparison with the established SZF wave sensor show that the correlation coefficient is above 0.9.The wave sensor design based on MEMS technology has good consistency with the measurement results of SZF wave sensor,and has practical application.