Design of Temperature Control System of MPCVD Equipment Sample Table
As the temperature control of the sample station of traditional MPCVD equipment requires manual adjusting the dis-placement of the sample station from plasma source,and the adjustment accuracy is poor,a temperature control system for the sample station was designed.At the same time,a hardware controller of the temperature control system for the sample station was designed.In the controller,STM32F407 single chip microcomputer was taken as the core,stepper motor,lead screw and metal bellows were taken as the actuator.To control the displacement of the sample table from plasma source in the cavity body,temperature control was achieve.A con-trol method combining the improved whale optimization algorithm(WOA)and neural network PID control algorithm was proposed to re-alize the adaptive adjustment of PID parameters.The simulation and experimental results show that,compared with the traditional PID algorithm,the overshoot is smaller,the control accuracy is higher,and the control effect is greatly improved when using the designed temperature control system.
MPCVD equipmenttemperature control systemimproved whale optimization algorithmBP neural network
万方数据
维普
