In recent years,new etching technologies emerged,curve structures are designed on silicon electrodes for semiconductor etching.The precision and roughness requirements of curved silicon electrodes are very high,they were produced abroad previously,and the specific process is unknown.An efficient and precise grinding method was developed for curved silicon electrodes.Through the analy-sis of curved silicon electrode parts,a process scheme of using five axis grinding technology for machining was proposed.Five axis pro-gramming software was used for programming,and a five axis grinding center with internal automation technology and digital simulation technology was used to verify the grinding strategy of curved silicon electrodes.The results indicate that this processing technology can improve processing efficiency and product yield,reduce grinding and polishing time,and reduce production costs.
关键词
曲面硅电极/精密磨削/机内自动化/数字仿真/工艺研究
Key words
curved silicon electrode/precision grinding/internal automation/digital simulation/process research
维普
万方数据