机床与液压2024,Vol.52Issue(7) :123-128,133.DOI:10.3969/j.issn.1001-3881.2024.07.019

基于不同加工工艺的微孔节流空气静压轴承的特性研究

Study on the Characteristics of Micro-hole Throttling Aerostatic Bearings Based on Different Processing Methods

于贺春 寇新俊 侯玮杰 刘海腾 李广平 张国庆 王文博
机床与液压2024,Vol.52Issue(7) :123-128,133.DOI:10.3969/j.issn.1001-3881.2024.07.019

基于不同加工工艺的微孔节流空气静压轴承的特性研究

Study on the Characteristics of Micro-hole Throttling Aerostatic Bearings Based on Different Processing Methods

于贺春 1寇新俊 2侯玮杰 3刘海腾 3李广平 3张国庆 1王文博1
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作者信息

  • 1. 中原工学院机电学院,河南郑州 450007
  • 2. 中原工学院机电学院,河南郑州 450007;天津航天机电设备研究所,天津 300301
  • 3. 天津航天机电设备研究所,天津 300301;天津市微低重力环境模拟技术重点实验室,天津 300301
  • 折叠

摘要

随着超精密加工技术和地面微低重力仿真的发展,相关产业对空气静压轴承的性能要求越来越高.由于传统的孔式节流器其结构特点不能完全满足实际使用的需要,节流孔直径与气膜间隙同一数量级的微孔节流空气静压轴承因其良好的刚度和承载特性,越来越受到关注.但在微孔节流器的发展过程中,微孔的加工工艺却限制了其推广应用.针对目前常用的三类微孔加工工艺,进行了理论仿真研究,通过建立不同加工工艺轴承仿真模型,运用双向流固耦合仿真方法,对比分析了基于不同加工工艺的微孔节流空气静压轴承的动静态特性.研究结果表明:锥孔类轴承承载性能优于其他两类,但耗气量大且在小间隙时刚度较差;薄壁直孔类轴承承载性能稍逊,但在大间隙下轴承刚度较佳;嵌套类轴承承载性能较差,但在小间隙下轴承刚度较大且耗气量较低.

Abstract

With the development of ultra-precision machining technology and ground micro-low gravity simulation,the performance requirements for aerostatic bearings are getting higher and higher.Because the structural characteristics of the traditional orifice restric-tors cannot fully meet the needs of the actual use,the micro-hole throttling aerostatic bearing restrictors with the same order of magni-tude as the air membrane gap has attracted attention more and more,due to its good stiffness and bearing characteristics.However,in the development of micro-hole throttle aerostatic bearing,the processing technology of micro-hole limits its popularization and application.Theoretical simulation research on three prevalent micro-hole machining processes was conducted.By constructing simulation models for each process and employing bidirectional fluid-solid coupling simulation methods,the dynamic and static characteristics of micro-hole restrictor aerostatic bearings produced by these processes were compared and analyzed.The results indicate that tapered hole bearings exhibit superior load-carrying capacity compared to the other two types,albeit with higher air consumption and reduced stiffness at low clearances;thin-walled straight-hole bearings demonstrate marginally lower load-carrying capacity,yet they maintain better stiffness at higher clearances;mosaic bearings,while exhibiting less optimal performance in load-carrying,provide greater stiffness and lower air consumption when the clearance is minimal.

关键词

空气静压轴承/超精密加工/微低重力仿真/微孔节流/静动态特性

Key words

aerostatic bearing/ultra-precision machining/micro-low gravity simulation/micro-hole throttling/static and dynamic characteristic

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基金项目

国家自然科学基金面上项目(51875586)

出版年

2024
机床与液压
中国机械工程学会 广州机械科学研究院有限公司

机床与液压

CSTPCD北大核心
影响因子:0.32
ISSN:1001-3881
参考文献量16
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