With the development of ultra-precision machining technology and ground micro-low gravity simulation,the performance requirements for aerostatic bearings are getting higher and higher.Because the structural characteristics of the traditional orifice restric-tors cannot fully meet the needs of the actual use,the micro-hole throttling aerostatic bearing restrictors with the same order of magni-tude as the air membrane gap has attracted attention more and more,due to its good stiffness and bearing characteristics.However,in the development of micro-hole throttle aerostatic bearing,the processing technology of micro-hole limits its popularization and application.Theoretical simulation research on three prevalent micro-hole machining processes was conducted.By constructing simulation models for each process and employing bidirectional fluid-solid coupling simulation methods,the dynamic and static characteristics of micro-hole restrictor aerostatic bearings produced by these processes were compared and analyzed.The results indicate that tapered hole bearings exhibit superior load-carrying capacity compared to the other two types,albeit with higher air consumption and reduced stiffness at low clearances;thin-walled straight-hole bearings demonstrate marginally lower load-carrying capacity,yet they maintain better stiffness at higher clearances;mosaic bearings,while exhibiting less optimal performance in load-carrying,provide greater stiffness and lower air consumption when the clearance is minimal.
关键词
空气静压轴承/超精密加工/微低重力仿真/微孔节流/静动态特性
Key words
aerostatic bearing/ultra-precision machining/micro-low gravity simulation/micro-hole throttling/static and dynamic characteristic