Active Disturbance Rejection Control Method for Flexure Hinge Micro Stage
Flexure hinge is usually used as the guide mechanism for the micro stage,due to the low natural frequency of the micro stage system,the control bandwidth of traditional PID is severely limited and the positioning precision is affected.Therefore,an active disturbance rejection control(ADRC)algorithm was designed,considering the unmodeled dynamics and external unknown disturbance as the total disturbance.And then,the total disturbance was estimated and compensated by extend states observer(ESO)to improve the control bandwidth of the system.In order to make full use of the known model information,a model-based ADRC algorithm was de-signed,the control performance of the micro stage system was further improved.As a result,a point-to-point motion experiment with a stroke of 10 μm was carried out.The results show that:PID is difficult to respond because the control bandwidth cannot be too large,and ADRC improves the bandwidth of the control system and achieves precise positioning.The response speed and positioning precision are further improved with model-based ADRC.Compared with ADRC,the setting time of model-based ADRC is reduced by 68.1％,the maximum tracking error is reduced by 53.8％,and the positioning precision is improved by 60.7％.
flexure hingemicro stageactive disturbance rejection control(ADRC)extend states observer(ESO)
万方数据
维普
